Three-dimensional solid capacitor

Are 3D dielectric capacitors fully-integrated in Silicon?

Here, we report on 3D dielectric capacitors fully-integrated in silicon with areal capacitance up to 1 μF/mm 2, and power and energy density of 566 W/cm 2 and 1.7 μWh/cm 2, respectively. The value of the areal capacitance sets a new record for silicon capacitors.

What are the characteristics of a capacitor?

Excellent stability with voltage and temperature (capacitance variation <2% up to 16 V and 100 °C). Capacitors are the most critical passive components of future in-package and on-chip electronic systems with augmented energy-storage capabilities for consumer and wearable applications.

How are silicon-integrated 3D capacitors fabricated?

To summarize, silicon-integrated 3D capacitors with unprecedented areal capacitance up to 1 μF/mm 2 were fabricated by ultra-high aspect-ratio (up to 100) electrochemical trenching of silicon and subsequent conformal coating with Al 2 O 3 and HfAlO x by atomic layer deposition.

What is the difference between a dielectric capacitor and a DC?

On the other hand, integrated dielectric capacitors (DCs) able to operate at higher voltage (tens of Volts) and higher frequencies (hundreds of kHz to MHz) suffer from significantly lower capacitance and energy densities.

How reliable are 3D capacitors?

The 3D capacitors feature operating frequency and voltage up to 70 kHz and 16 V, respectively, and excellent reliability over 100 h of continuous operation (>10 8 charge/discharge cycles), versus operation voltage and temperature.

What is the energy density of ha-AAO dielectric capacitor?

The capacitance density of about 47 μF/cm 2 for 6-μm-thick HA-AAO was achieved, and the breakdown voltage of about 15 V was observed. As a result, the energy density of the unique dielectric capacitor can reach about 2 Wh/kg through optimizing the fabrication process.