Get a Free Quote

Three-dimensional solid capacitor

We report the fabrication process and the electrical characteristics of high capacitance density capacitors with three-dimensional solid-state nanocapacitors based on a …

Are 3D dielectric capacitors fully-integrated in Silicon?

Here, we report on 3D dielectric capacitors fully-integrated in silicon with areal capacitance up to 1 μF/mm 2, and power and energy density of 566 W/cm 2 and 1.7 μWh/cm 2, respectively. The value of the areal capacitance sets a new record for silicon capacitors.

What are the characteristics of a capacitor?

Excellent stability with voltage and temperature (capacitance variation <2% up to 16 V and 100 °C). Capacitors are the most critical passive components of future in-package and on-chip electronic systems with augmented energy-storage capabilities for consumer and wearable applications.

How are silicon-integrated 3D capacitors fabricated?

To summarize, silicon-integrated 3D capacitors with unprecedented areal capacitance up to 1 μF/mm 2 were fabricated by ultra-high aspect-ratio (up to 100) electrochemical trenching of silicon and subsequent conformal coating with Al 2 O 3 and HfAlO x by atomic layer deposition.

What is the difference between a dielectric capacitor and a DC?

On the other hand, integrated dielectric capacitors (DCs) able to operate at higher voltage (tens of Volts) and higher frequencies (hundreds of kHz to MHz) suffer from significantly lower capacitance and energy densities.

How reliable are 3D capacitors?

The 3D capacitors feature operating frequency and voltage up to 70 kHz and 16 V, respectively, and excellent reliability over 100 h of continuous operation (>10 8 charge/discharge cycles), versus operation voltage and temperature.

What is the energy density of ha-AAO dielectric capacitor?

The capacitance density of about 47 μF/cm 2 for 6-μm-thick HA-AAO was achieved, and the breakdown voltage of about 15 V was observed. As a result, the energy density of the unique dielectric capacitor can reach about 2 Wh/kg through optimizing the fabrication process.

Low-Cost and High-Productivity Three-Dimensional …

We report the fabrication process and the electrical characteristics of high capacitance density capacitors with three-dimensional solid-state nanocapacitors based on a …

Three-dimensional silicon-integrated capacitor with unprecedented …

Here, we report on 3D dielectric capacitors fully-integrated in silicon with areal capacitance up to 1 μF/mm 2, and power and energy density of 566 W/cm 2 and 1.7 μWh/cm 2, respectively. The value of the areal capacitance sets a new record for silicon capacitors.

Low-Cost and High-Productivity Three-Dimensional …

We report the fabrication process and the electrical characteristics of high capacitance density capacitors with three-dimensional solid-state nanocapacitors based on a ZnO nanowire template. Stand-up ZnO nanowires are grown face down on p-type Si substrates coated with a ZnO seed layer using a hydrothermal method. Stacks of AlZnO/Al

Fully Three-Dimensional Silicon-Integrated Dielectric Capacitor at …

In this work, we successfully address the challenge of achieving a 3D silicon-based dielectric capacitor with high capacitance density and large operation voltage and …

Low-Cost and High-Productivity Three-Dimensional

We report the fabrication process and the electrical characteristics of high capacitance density capacitors with three-dimensional solid-state nanocapacitors based on a ZnO nanowire template. Stand-up ZnO …

Three dimensional solid-state supercapacitors from aligned single ...

Here, we demonstrate the experimental design of an en-ergy storage material framework that combines the concept of the conventional solid-state capacitor architecture with the high …

Three dimensional solid-state supercapacitors from aligned single ...

We demonstrate the correlation between experimentally measured capacitance and modeled capacitance for the SWNT–Al 2 O 3 system, and further predict a material …

Ultra high density three dimensional capacitors based on Si …

The fabrication process and the electrical characteristics of high capacitance density capacitors with three-dimensional solid-state nanocapacitors based on a ZnO nanowire template are reported, indicating that the resistance-capacitance time constants were 550 ns for both the charging and discharging processes and the time constant ...

Three‑dimensional capacitor embedded in fully Cu‑filled …

Abstract— This paper demonstrates the successful integration of three-dimensional (3-D) metal-insulator-metal (MIM) capacitors embedded in fully-filled Cu TSVs with diameter of 10 and 20 …

Three-Dimensional Capacitor Embedded in Fully Cu-Filled …

This paper demonstrates the successful integration of three-dimensional (3-D) metal-insulator-metal (MIM) capacitors embedded in fully-filled Cu TSVs with diameter of 10 and 20 μm. Their thermo-mechanical reliability has been studied with both physical characterizations and electrical characterizations.

Three dimensional solid-state supercapacitors from aligned …

Here, we demonstrate the experimental design of an en-ergy storage material framework that combines the concept of the conventional solid-state capacitor architecture with the high surface area electrode that permits the comparably large energy density in an EDLC device.

Three‑dimensional capacitor embedded in fully Cu‑filled …

Abstract— This paper demonstrates the successful integration of three-dimensional (3-D) metal-insulator-metal (MIM) capacitors embedded in fully-filled Cu TSVs with diameter of 10 and 20 μm. Their thermo-mechanical reliability has been studied with both physical characterizations and electrical characterizations.

Low-Cost and High-Productivity Three-Dimensional ...

We report the fabrication process and the electrical characteristics of high capacitance density capacitors with three-dimensional solid-state nanocapacitors based on a ZnO nanowire template. Stand-up ZnO nanowires are grown face down on p-type Si substrates coated with a ZnO seed layer using a hydrothermal method. Stacks of AlZnO ...

Dielectric capacitors with three-dimensional nanoscale ...

We demonstrate that such limitations can be overcome by using a completely new three-dimensional (3D) nanoarchitectural electrode design. First, we fabricate a unique nanoporous anodic aluminum oxide (AAO) membrane with two sets of interdigitated and isolated straight nanopores opening toward opposite planar surfaces.

Fully Three-Dimensional Silicon-Integrated Dielectric Capacitor …

In this work, we successfully address the challenge of achieving a 3D silicon-based dielectric capacitor with high capacitance density and large operation voltage and frequency range, using a fabrication process that is compatible with silicon ICs technology.

Dielectric capacitors with three-dimensional nanoscale …

We demonstrate that such limitations can be overcome by using a completely new three-dimensional (3D) nanoarchitectural electrode …

Three-Dimensional Capacitor Embedded in Fully Cu-Filled …

This paper demonstrates the successful integration of three-dimensional (3-D) metal-insulator-metal (MIM) capacitors embedded in fully-filled Cu TSVs with diameter of 10 and 20 μm. Their …

Three-dimensional silicon-integrated capacitor with …

Here, we report on 3D dielectric capacitors fully-integrated in silicon with areal capacitance up to 1 μF/mm 2, and power and energy density of 566 W/cm 2 and 1.7 μWh/cm …

Ultra high density three dimensional capacitors based on Si …

The fabrication process and the electrical characteristics of high capacitance density capacitors with three-dimensional solid-state nanocapacitors based on a ZnO …

Three dimensional solid-state supercapacitors from aligned …

We demonstrate the correlation between experimentally measured capacitance and modeled capacitance for the SWNT–Al 2 O 3 system, and further predict a material framework that can yield both high power and high energy densities utilizing better dielectric materials and optimized SWNT array geometries. 2. Experimental details. 2.1.